Multiprobe MXPS System for thin film studies created with a Pulsed Laser Deposition (PLD) system
|
|
| MXPS: The configuration of the analysis system (right pictureside) allows the structural analysis of the sample using a sample manipulator (polar and azimuthal rotation) with a sample heater which is suitable for oxygen environment, an Electron Analyzer EA125 U7, a DAR400 x-ray gun, a SPA-LEED and a VT-AFM25 with Matrix. The sample distribution chamber with its sample storage facility (6 samples) realizes the transfer between PLD system and analysis system and allows access from the fast entry lock chamber (6 samples). The PLD system (left picture side) allows to prepare samples under high oxygen partial pressure. Material deposition is realized by means of an external pulsed laser. The beam hits the rotating target on the target stage (up to 4 targets) and the material is deposited on the heated sample on the manipulator (polar and azimuthal rotation). The deposition setup allows computer controlled sequences and recipes. A separate target and sample loadlock allows fast introduction of samples and targets. |
|
|
