UHV NANOPROBE System

UHV NANOPROBE System

•	4-Point Transport Measurements on Nanostructures
•	Electrical Contacting of Nanodevices
•	STM-Based Safe & Non-Destructive Tip Approach
•	Full STM Capability
•	True UHV Operation for Clean & Artefact-Free Surfaces

The UHV NANOPROBE is a sophisticated analytical instrument especially designed for the local, non-destructive function testing and examination of semiconductor or biomolecular nanodevices with dimensions down to a few nanometers.

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STRUCTURAL ANALYSIS

STM

MFM

LEED

SPA-LEED

RHEED

SEM

STM/SEM

SNOM

Sample Preparation

Contact AFM

Lateral AFM

Force Distance AFM

Non Contact AFM

EFM

SKPM

Needle Sensor AFM

Scanning Tunneling Microscopy (STM)

MULTIPROBE S
(System Concept & Preparation Chamber Variations)

MULTIPROBE P
(System Concept & Preparation Chamber Variations)

MULTIPROBE XP
(System Concept & Preparation Chamber Variations)

MULTIPROBE RM
(System Concept & Preparation Chamber Variations)

Multi-Chamber System
(System Concept & Preparation Chamber Variations)

MULTIPROBE MXPS
(Dedicated for Spectroscopy)

MULTIPROBE HREELS
(Dedicated for Spectroscopy)

MULTIPROBE LT
(Dedicated for Low Temperatures)

STM 1
(Room Temperature)

UHV AFM/STM
(Room Temperature)

Variable Temperature UHV SPM
(Variable Temperature Instruments)

LT STM
(Low Temperature Instruments)

Cryogenic SFM
(Low Temperature Instruments)

Cryogenic STM
(Low Temperature Instruments)

MULTIPROBE ARUPS
(Dedicated for Spectroscopy)

Large Sample SPM
(Large Samples)

Large Sample Beam Defl. AFM
(Large Samples)

UHV NANOPROBE
(Multi-Technique SPMs)

STM/SEM Stage
(Multi-Technique SPMs)

MULTIPROBE Cryogenic
(Dedicated for Low Temperatures)

SPM PROBE
(Dedicated for SPM)

MULTISCAN LAB
(Combined SPM/SEM/SAM)

UHV NANOPROBE System
(4 Point Probe in UHV)