Large Sample Beam Defl. AFM

Illustrated is the sample stage for a special 1"  wafer holder (University Cottbus). Loading of samples and sensors is performed by means of a special wobble stick.

The Large Sample UHV AFM is designed for applications on semiconductor wafers from 1 to 4 inches in diameter. The microscope offers a wide scan range, atomic resolution capability, precision tip coarse positioning within an area of 10 x 10 mm², and a safe, remote controlled tip exchange.