Large Sample SPM
•
1" to 4" wafer samples
•
3-dimensional tip coarse positioning
•
Remote controlled tip exchange
•
Customized wafer handling
Illustrated is the sample stage for a 2" Riber type wafer holder.
The Large Sample UHV SPM (LS SPM) is designed for applications on semiconductor wafers from 1 to 4 inches in diameter. The microscope offers a wide scan range, atomic resolution capability, precision tip coarse positioning within an area of 10 x 10 mm
2
, and a safe, remote controlled tip exchange.
Sensor modules, which plug into the piezo scanner (centre) greatly ease tip exchange
STRUCTURAL ANALYSIS
STM
MFM
LEED
SPA-LEED
RHEED
SEM
STM/SEM
SNOM
Sample Preparation
Contact AFM
Lateral AFM
Force Distance AFM
Non Contact AFM
EFM
SKPM
Needle Sensor AFM
Scanning Tunneling Microscopy (STM)
MULTIPROBE S
(System Concept & Preparation Chamber Variations)
MULTIPROBE P
(System Concept & Preparation Chamber Variations)
MULTIPROBE XP
(System Concept & Preparation Chamber Variations)
MULTIPROBE RM
(System Concept & Preparation Chamber Variations)
Multi-Chamber System
(System Concept & Preparation Chamber Variations)
MULTIPROBE MXPS
(Dedicated for Spectroscopy)
MULTIPROBE HREELS
(Dedicated for Spectroscopy)
MULTIPROBE LT
(Dedicated for Low Temperatures)
STM 1
(Room Temperature)
UHV AFM/STM
(Room Temperature)
Variable Temperature UHV SPM
(Variable Temperature Instruments)
LT STM
(Low Temperature Instruments)
Cryogenic SFM
(Low Temperature Instruments)
Cryogenic STM
(Low Temperature Instruments)
MULTIPROBE ARUPS
(Dedicated for Spectroscopy)
Large Sample SPM
(Large Samples)
Large Sample Beam Defl. AFM
(Large Samples)
UHV NANOPROBE
(Multi-Technique SPMs)
STM/SEM Stage
(Multi-Technique SPMs)
MULTIPROBE Cryogenic
(Dedicated for Low Temperatures)
SPM PROBE
(Dedicated for SPM)
MULTISCAN LAB
(Combined SPM/SEM/SAM)
UHV NANOPROBE System
(4 Point Probe in UHV)
