PEEM/ µPES: Multicrystalline Silicon (mcSi)

  • PEEM- image (top- right inset) shows grain boundaries on mcSi.
  • Spectra were taken on the encircled sample regions at HE- TGM- 1 at BESSY- I.
  • The bold spectrum of Si 2p was taken at U125/ 1- PGM at BESSY- II.


Reference: P. Hoffmann 1 , D. Schmeißer 1 , D. R. Batchelor 1 , M. Kittler 2 , R. Follath 3 , W. Braun 3
1 BTU Cottbus; Angewandte Physik/ Sensorik
2 IHP (Institut für Halbleiterphysik); Frankfurt (Oder)
3 BESSY GmbH; Berlin

 
This result has been obtained with :
FOCUS PEEM with MICROANALYSER

download as pdf

 
 
PEEM